Multi-part Document
BS EN ISO 14644 - Cleanrooms and associated controlled environments
https://doi.org/10.3403/BSENISO14644
This is a multi-part document divided into the following parts:
- Part 1 Cleanrooms and associated controlled environments. Classification of air cleanliness
- Part 2 Cleanrooms and associated controlled environments. Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
- Part 3 Cleanrooms and associated controlled environments. Test methods
- Part 4 Cleanrooms and associated controlled environments. Design, construction and start-up
- Part 5 Cleanrooms and associated controlled environments. Operations
- Part 6 Cleanrooms and associated controlled environments. Vocabulary
- Part 7 Cleanrooms and associated controlled environments. Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
- Part 8 Cleanrooms and associated controlled environments. Classification of airborne molecular contamination
- Part 9 Cleanrooms and associated controlled environments. Classification of surface cleanliness by particle concentration
- Part 10 Cleanrooms and associated controlled environments. Part 10: Classification of surface cleanliness by chemical concentration
- Part 13 Cleanrooms and associated controlled environments. Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
- Part 14 ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms. Assessment of suitability for use of equipment by airborne particle concentration
- Part 15 Cleanrooms and associated controlled environments. Assessment of suitability for use of equipment and materials by airborne chemical concentration
- Part 16 Cleanrooms and associated controlled environments. Energy efficiency in cleanrooms and separative devices
- Part 17 Cleanrooms and associated controlled environments. Particle deposition rate applications
- Part 18 Cleanrooms and associated controlled environments. Assessment of suitability of consumables